|David A. Bloss is vice president in the Technology and Manufacturing Group and the director of fab equipment supply chain at Intel Corporation. He oversees Intel’s worldwide capital equipment business for wafer manufacturing facilities, which includes responsibility for fabrication, lithography and metrology equipment, equipment spares and service, and factory automation in support of technology development and high-volume manufacturing. Dave began his Intel career in 1994 as a factory automation software engineer developing and implementing automated material-handling systems for Intel’s 200mm wafer fabrication facilities. He subsequently held various development, support and leadership positions within Intel’s factory automation organizations throughout the company’s transition to 300mm wafer manufacturing, including director of technology manufacturing engineering automation with responsibility for the factory automation supply chain. He has also held a variety of leadership positions in global supply management, including director of Intel Resale Corporation, where he was responsible for the sale of excess product inventory, factory equipment and other assets. Intel recognized Bloss with an Intel Achievement Award in 2000 for his contribution to Intel’s transition to 300mm wafer manufacturing through standardized equipment and automated material-handling systems. This work also led Bloss to write extensively on topics related to 300mm automated manufacturing and control in semiconductor factories, including approximately 20 technical papers, presentations and specifications for various industry associations such as Semiconductor Equipment and Materials International (SEMI) and the semiconductor industry’s I300I consortium. Dave received his bachelor’s degree in computer and electrical engineering from Purdue University.|
|Jim Feldhan founded Semico Research in 1994. A 30-year veteran of the semiconductor industry, he brings his management, forecasting and modeling expertise to Semico, along with a reputation of quality research. Jim designed and developed the research methodologies and report structures, which are the basis for Semico’s Custom Research and Portfolio Services.|
|Mark Scholefield has over 30 years experience in the semiconductor industry. Mark began his career at AT&T, and held various engineering and management positions in manufacturing and development of SOI wafers, high voltage IC’s, advanced CMOS and BiCMOS IC’s, lithium niobate modulators, and indium phosphide lasers and detectors. After the closure of AT&T/Lucent/Agere fabs in 2003, he moved on to a startup company, the Infotonics Technology Center, where he helped acquire the equipment and materials to start up a 150mm MEMS development fab. In 2005, he joined Infineon/Qimonda as a Defect Reduction Engineer at their 200 & 300mm fabs in Richmond, Virginia. At Qimonda, he focused on yield improvement and defect reduction in a high-volume DRAM fab. In 2010, he joined AMD/GLOBALFOUNDRIES as part of the Fab 8 startup team. Mark worked on tool and material selection, and 32/28nm technology transfer to the Malta, NY site. Since 2014, he has been a member of the Global Materials Engineering organization, and was responsible for BOM transfer during the 14nm technology transfer from Samsung. Currently, he has global engineering responsibility for bulk silicon wafers at GLOBALFOUNDRIES. Mark has a B.S. in Chemical Engineering from the University of Massachusetts at Amherst, and lives with his wife Lisa and son Bryce in Ballston Lake, NY.|
|Michelle Garza is a Senior Research and Development Chemist at Fujimi Corporation. At Fujimi Michelle has been involved in slurry development and new product introduction including slurry manufacturing process ramps. She has worked in the semiconductor industry for 14 years. Michelle holds a PhD in analytical chemistry from the University of North Texas.|
|Dr. Keith R. Long is a research geologist with the U.S. Geological Survey, Mineral Resources Program, in Tucson, Arizona. He investigates the geological availability and economic utilization of critical minerals, in particular rare earth elements (REE). His most recent products include a study of alternatives for sustainable sourcing of REE, an analysis of the economics of REE mining, and contributions to a global database of REE deposits. Recently, he began work on a database for other critical minerals, including tantalum, in the US.|
|Sanjeev Aggarwal directs the R&D program for Everspin’s Spin-Torque MRAM. The scope includes managing engineering groups to define resources and execute on projects from technology definition to qualification, driving cross functional alignment across various departments, as well as manage joint development agreements for technology transfer and production. Prior to this role, he was VP, Manufacturing and Process at Everspin, where he was responsible for FAB operations managing the production of Toggle and Spin-Torque MRAM. Sanjeev’s technical contributions have led to over 60 issued patents, more than 100 publications and numerous invited presentations. He graduated from Cornell University with a doctorate in Materials Science and Engineering in 1996.|
|Dr. Alok Ranjan is Director & Senior Member of Technical Staff in Etch division of Tokyo Electron Ltd. He leads advanced plasma etch process development & diagnostics. He received his BS in Chemical Engineering from Indian Institute of Technology followed by PhD in Chemical Engineering at the University of Houston, USA. His graduate research focused on the development of neutral beam etching and DC superposition in CCP geared toward damage-free etching for next generation devices. Dr. Ranjan is a member of the AVS Program Committee, ALE workshop committee, reviewer of American Institute of Physics Journals and Journal of Applied Physics, the author of numerous refereed journal publications and holds more than 20 patents related to advanced semiconductor device manufacturing technology.|
|James G. Votaw is a partner in the Washington office of Keller and Heckman LLP. His legal practice is focused on environmental, health and safety law and regulation, with a concentrationon the regulation of conventional and nanoscale chemicals, pesticides and devices, and other consumer and industrial products. Mr. Votaw represents clients before State and Federal regulatory agencies and federal courts. He has extensive experience in compliance counseling on matters related to the Toxic Substances Control Act (TSCA); the Federal Insecticide, Fungicide and Rodenticide Act (FIFRA); the Clean Air (CAA) and Clean Water Acts (CWA); the Comprehensive Environmental Response, Compensation, and Liability Act (CERCLA); the Consumer Product Safety Commission (CPSC); California’s Proposition 65; Registration, Evaluation, Authorization, and Restriction of Chemicals (REACH); Restriction of Hazardous Substances (RoHS); and Waste Electrical and Electronics Equipment (WEEE). For his clients, Mr. Votaw obtains pre-market product approvals and exemptions, including the first U.S. approval of a nanoscale pesticide. He negotiates testing orders, defends enforcement actions, advises on restrictions and disclosures associated with the chemical content of products, counsels on release and other environmental reporting, and supports environmental regulatory and liability aspects of commercial transactions. Further, he participates in technical rulemaking proceedings, provides strategic and regulatory compliance counseling within existing and emerging industries, initiates compliance training, conducts internal investigations, performs compliance auditing, offers facility permitting services and develops product compliance plans and systems. Mr. Votaw has spent his career in environmental law private practice. His portfolio includes clients from the nanotechnology, chemicals, life sciences, semiconductor, filtration, equipment manufacturing, transportation, retail and consumer product, property development, and trade association industry sectors. He currently serves as a vice chair of the American Bar Association’s Pesticide, Chemical Regulation and Right to Know Committee, where he serves as editor of the Committee’s annual retrospective review of the year’s regulatory and litigation developments.|
|Presentation: Rare Gas Recovery & Recycling
Presenter: Kenneth G. Unfried, Ph.D.
Dr. Unfried has a B.S. in chemistry from Principia College, and Ph.D. from Rice University. At Rice, he studied with Robert F. Curl, 1996 recipient of the Nobel Prize in Chemistry. He has many years experience in the chemical industry, having worked for Bayer and Solvay in the past. He currently manages a large segment of the global rare gas business for Linde Electronics and Specialty Gases.
|Dr. Glen Wilk is currently Vice President Corporate R&D for ASM in Phoenix, AZ. He is focused on leading advanced development programs for future node technologies. Previously Dr. Wilk lead ASM’s thermal ALD product and process developments for over 10 years, including the introduction and continued scaling of ALD high-k metal gate technology. Prior to ASM he worked on semiconductor technology development at both Bell Labs and Texas Instruments. He earned his PhD in Applied Physics at Harvard and BS degree in Materials Science from Cornell. Dr. Wilk holds numerous patents and has authored many publications in the semiconductor field.|
|Dennis Brestovansky is Director of Technology Commercialization at Praxair, Inc. for electronics and specialty gas markets worldwide. He has over 30 years experience in advanced materials for semiconductor and other applications and has served in business leadership, technology and business development roles for companies ranging from Fortune 300 to venture capital financed entities. In his present role, he is responsible for identifying opportunities for new technology development and migrating emerging product offerings globally. Brestovansky holds degrees in Chemical Engineering from the University of Delaware and a doctorate from the Swiss Federal Institute of Technology.|